3M™ Electronic Surfactants
3M™ Electronic Surfactants는 BOE / BHF 를 포함한다양한 응용 분야에서 습윤(wetting), 레벨링(levelling) 및 흐름성(Flow control) 개선에 효과적인 수계솔루션의 음이온 계면활성제입니다.
General Properties 특성
• Highly soluble in BOE solutions
• Improved wetting
• Filterable
• Low effective concentrations
• Little or no effect on the etch rate
• Limited surface adsorption
• Low metals
Applications 용도
• Photoresist
: Developer, Stripper,
: Edge bead removers
: Anti-reflective coatings
• BOE (Buffered Oxide Etch)
• BHF (Buffered HF Solutions)
